Abstract: The high-tech industry is the leading and strategic industry of the national economy, and it is the only way for the high-quality economic development to make the high-tech industry bigger and stronger. Based on the data of 30 provinces in the mainland of China, this paper uses the Fuzzy set qualitative comparative analysis (fsQCA) method to explore the configuration of factors affecting the development of high-tech industries and its upgrading path. The single factor necessity analysis shows that the consistency level of investment in new product research and development and R&D manpower is above 0.9, which is an indispensable condition for promoting the development of high-tech industries; The analysis of the sufficiency of conditional configuration reveals that there are three configuration models that promote the development of high-tech industries, namely the "economy+policy" driven model, the "technology+openness" driven model, and the "technology+economy+policy" driven model. Therefore, efforts need to be made to enhance the development level of China's high-tech industry by strengthening research and development investment, laying a solid foundation for factor investment, and implementing differentiated industrial policies.